Fully Automatic Ultrasonic Cleaning Machine, Ultrasonic Cleaning + Passivation System For Semiconductor Valve Bodies
Revolutionizing Precision Cleaning for High-Purity Semiconductor Components
Product Overview
Our fully automatic ultrasonic cleaning machine, integrated with an advanced passivation system, is specifically engineered for semiconductor valve bodies, ensuring uncompromising cleanliness and corrosion resistance. Designed to meet the stringent requirements of semiconductor manufacturing, this system combines ultrasonic technology with chemical passivation to deliver a seamless, high-yield solution for critical components.
Core Functions
-
Multi-Stage Ultrasonic Cleaning
- High-Frequency Ultrasonic Cavitation: Utilizes 200kHz ultrasonic waves to generate micro-bubbles that implode on surfaces, dislodging particles as small as 0.2 microns. This non-contact method ensures thorough cleaning of complex geometries, including deep cavities and narrow channels, without mechanical damage.
- 9-Stage Process: Features dedicated tanks for pre-wash, ultrasonic cleaning, multiple rinses, passivation, IPA dehydration, and hot-air drying. Each stage is optimized for specific tasks, such as particle removal, organic residue elimination, and surface activation.
-
Integrated Passivation System
- Chemical Passivation: Employs a 100% concentration stainless steel passivation solution (e.g., nitric acid-based) to form a dense, protective oxide layer on 316L stainless steel surfaces. This layer enhances corrosion resistance by increasing the material’s anti-corrosion potential by over 500mV.
- Precision Control: The passivation process is conducted at room temperature for 30–60 minutes, with real-time monitoring of oxidation-reduction potential (ORP) to ensure consistency.
Technical Parameters
- Ultrasonic Power: 500W (adjustable), supported by 20–25W piezoelectric transducers (PZT) for uniform energy distribution.
- Temperature Control: 20–80°C for cleaning and passivation stages, with ±1°C accuracy.
- Material Compatibility: All wetted parts (tanks, nozzles, tubing) are constructed from SUS316L stainless steel or PTFE, compliant with SEMI F20 standards for high-purity applications.
- Dimensions: Customizable to accommodate valve sizes up to 300mm in diameter. A typical configuration measures 2000×1000×1800mm (L×W×H), weighing ~800kg.
- Cycle Time: 15–30 minutes per batch, depending on component complexity.
